Effect of pad groove geometry on material removal characteristics in chemical mechanical polishing

Published 2012 View Full Article

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Title
Effect of pad groove geometry on material removal characteristics in chemical mechanical polishing
Authors
Keywords
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Journal
International Journal of Precision Engineering and Manufacturing
Volume 13, Issue 2, Pages 303-306
Publisher
Springer Nature
Online
2012-02-09
DOI
10.1007/s12541-012-0038-y
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