Model Friction Studies of Chemical Mechanical Planarization Using a Pin-on-Disk Tribometer

标题
Model Friction Studies of Chemical Mechanical Planarization Using a Pin-on-Disk Tribometer
作者
关键词
CMP, Tribology, Water, CMP pad, CMP slurry
出版物
TRIBOLOGY LETTERS
Volume 67, Issue 3, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2019-06-24
DOI
10.1007/s11249-019-1188-1

向作者/读者发起求助以获取更多资源

Reprint

联系作者

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started