Article
Engineering, Mechanical
Guang Xia, Zirui Wang, Qingyu Yao, Ping Sun, Huaijun Guan, Yongguang Wang, Cheng Fan, Da Bian, Dong Zhao, Yongwu Zhao
Summary: This paper proposes a novel material removal rate (MRR) model for aluminum chemical mechanical polishing (CMP) based on molecular-scaled removal mechanism, micro-contact force equilibrium theory, chemical reaction kinetics and diffusion effects. The model considers the lubricant effect on the removal rate at low polishing pressure and clarifies the nonlinear dependence of removal rate on lubricant concentration, oxidizer concentration, and abrasive concentration. The theoretical predictions show qualitative agreement with the experimental results.
Article
Materials Science, Ceramics
Chen Zhou, Xiangyang Xu, Lei Dai, Haiming Gong, Shuntian Lin
Summary: By utilizing electrostatic attraction, core-shell structured composite abrasives were assembled, enhancing polishing efficiency and surface quality, while increasing the polishing interface area.
CERAMICS INTERNATIONAL
(2021)
Article
Engineering, Chemical
Liang Jiang, Qiuyu Li, Yushan Chen, Yuan Wu, Mao Sun, Linmao Qian
Summary: Chemical mechanical polishing (CMP) is used to achieve planarization in copper interconnect fabrication. In this study, polyacrylic acid (PAA) was used as a lubricant and complement to 1,2,4-triazole for copper CMP. The addition of PAA led to an ultra-smooth copper surface with 1 nm roughness and a relatively uniform surface film. PAA served as an effective lubricant and complemented 1,2,4-triazole to improve the copper surface quality.
Article
Engineering, Mechanical
Gengzhuo Li, Chen Xiao, Shibo Zhang, Shengquan Luo, Yuhan Chen, Yongbo Wu
Summary: To address the low polishing efficiency in traditional loose-abrasive chemical mechanical polishing, a humidity-controlled fixed-abrasive chemical mechanical polishing method using CeO2 pellet is proposed. Both nano-scratch tests and fixed-abrasive polishing experiments confirm the irreplaceable role of water molecules in silicon material removal, with higher humidity resulting in better removal. Fixed-abrasive polishing experiments under saturated humidity achieved a surface roughness below Ra 2 nm at an efficiency of 0.9 μm/h, with minimal stress on the polished surface. The method is proven effective for stress relief after grinding.
TRIBOLOGY INTERNATIONAL
(2023)
Article
Engineering, Mechanical
Lei Xu, Kihong Park, Hong Lei, Pengzhan Liu, Eungchul Kim, Yeongkwang Cho, Taesung Kim, Chuandong Chen
Summary: In this study, the material removal mechanism of cavitation in the polishing process was investigated in detail, and a new model suitable for micro-nano bubble auxiliary material removal in CMP was developed. The experimental results show that micro-nano bubbles can greatly increase the material removal rate and result in a lower surface roughness.
Article
Chemistry, Multidisciplinary
Chien-Liang Liu, Chun-Jan Tseng, Wen-Hoar Hsaio, Sheng-Hao Wu, Shu-Rong Lu
Summary: This paper proposes a deep learning model called a fusion network for predicting the wafer material removal rate (MRR) in semiconductor manufacturing. The model separates features into shallow and deep features and learns the complex interactions among them through nonlinear transformations and feature embeddings. Experimental results show that the proposed model outperforms competitors and other methods.
APPLIED SCIENCES-BASEL
(2022)
Article
Chemistry, Physical
Wenxiang Xie, Zhenyu Zhang, Xin Chen, Shiqiang Yu, Chunjing Shi, Hongxiu Zhou, Wei Wen
Summary: This study investigates the effects of different cations on the material removal rate (MRR) during chemical mechanical polishing (CMP) of silicon (Si) wafer. The results show that when the concentration of NH4+ ions is 125 mmol/L, the MRR of Si wafer reaches 1687 Å/min, which is a 107.8% increase compared to the controlled group. It is also found that the nanometer silica abrasives remain in a good monodisperse state during CMP.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2023)
Article
Chemistry, Multidisciplinary
Wenping Geng, Xiangyu Yang, Gang Xue, Wenhao Xu, Kaixi Bi, Linyu Mei, Le Zhang, Xiaojuan Hou, Xiujian Chou
Summary: The study successfully achieved the integration technology of wafer-level LiNbO3 single-crystal thin film on Si, optimizing the spin-coating speed and obtaining high-quality adhesive under different baking conditions to achieve high bonding strength. Through further polishing treatment, the thickness of LiNbO3 single crystal was successfully reduced, and a defect-free bonding interface was obtained.
Article
Automation & Control Systems
Le Nam Quoc Huy, Le Ngoc Quynh Hoa, Chao-Chang A. Chen
Summary: This study investigates the challenges of copper CMP technique and develops a three-dimensional microstructural model for polishing pads. It also introduces a new calibration method for material removal rates. The findings provide valuable insights for developing CMP process models and advanced applications.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2023)
Article
Engineering, Manufacturing
Xu Yang, Xiaozhe Yang, Kentaro Kawai, Kenta Arima, Kazuya Yamamura
Summary: The study proposes a three-step silicon carbide wafer manufacturing process using slurryless electrochemical mechanical polishing, which can rapidly transform an unprocessed SiC wafer to an atomically smooth surface, thereby reducing the cost and manpower required during SiC wafer manufacturing.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Chemistry, Physical
Qing Mu, Zhuji Jin, Xiaolong Han, Ying Yan, Zili Zhang, Ping Zhou
Summary: The study investigated the effects of slurry pH on the chemical and mechanical actions of YAG in chemical mechanical polishing process. The results demonstrated the removal mechanisms at different pH values, providing insights for optimizing the polishing process.
APPLIED SURFACE SCIENCE
(2021)
Article
Engineering, Mechanical
Mayank Srivastava, Pulak M. Pandey
Summary: A novel hybrid finishing process that combines chemical-mechanical polishing (CMP) and magneto-rheological finishing (MRF) was used to improve the surface quality of monocrystalline silicon wafers. Experimental results and statistical analysis indicated that the major factors influencing polishing effectiveness were the percentage CIP concentration and working gap.
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE
(2021)
Article
Automation & Control Systems
Lifei Zhang, Shuhui Wang, Tongqing Wang, Xinchun Lu
Summary: This study optimized the final chemical mechanical polishing (CMP) step for Cobalt interconnects by introducing surfactants in hydrogen peroxide-based slurries. The research results showed that the functional groups of surfactants directly influenced the removal rates of Cobalt, and different surfactants also had an impact on the absolute zeta potentials of abrasive particles, which showed a strong negative correlation with the Cobalt removal rates. Additionally, there was a positive correlation between oxide removal rates and particle sizes affected by corresponding surfactants.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2023)
Article
Physics, Multidisciplinary
Dao-Huan Feng, Ruo-Bing Wang, Ao-Xue Xu, Fan Xu, Wei-Lei Wang, Wei-Li Liu, Zhi-Tang Song
Summary: A new acidic slurry containing sodium hypochlorite was developed for the CMP of TiN film, achieving high material removal rate and selectivity. Analysis using XPS and potentiodynamic polarization measurement helped to understand the cyclic reaction polishing mechanism of TiN CMP process.
Article
Engineering, Industrial
Wantang Wang, Baoguo Zhang, Yunhui Shi, Tengda Ma, Jiakai Zhou, Ru Wang, Hanxiao Wang, Nengyuan Zeng
Summary: This study investigated the synergistic effect of UV and TiO2 on the activation of PS to improve the CMP properties of 4H-SiC wafers. The response surface method was employed to optimize the polishing process, achieving a high MRR and low surface roughness.
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
(2021)
Article
Materials Science, Multidisciplinary
Yang Li, Zhongli Liu, Jianbin Luo, Shangzhou Zhang, Jianxun Qiu, Yongyong He
MATERIALS CHARACTERIZATION
(2019)
Article
Engineering, Mechanical
Xiangyu Ge, Tobias Halmans, Jinjin Li, Jianbin Luo
Article
Engineering, Mechanical
Wei Wang, Yongyong He, Jun Zhao, Junyuan Mao, Yutong Hu, Jianbin Luo
Article
Engineering, Mechanical
Shaohua Zhang, Yijun Qiao, Yuhong Liu, Liran Ma, Jianbin Luo
Article
Engineering, Multidisciplinary
Shiguang Peng, Lin Zhang, Guoxin Xie, Yue Guo, Lina Si, Jianbin Luo
COMPOSITES PART B-ENGINEERING
(2019)
Article
Chemistry, Multidisciplinary
Zhiwei Yu, Aisheng Song, Luzhao Sun, Yanglizhi Li, Lei Gao, Hailin Peng, Tianbao Ma, Zhongfan Liu, Jianbin Luo
Article
Chemistry, Physical
Yilong Ren, Guoxu Liu, Hang Yang, Tong Tong, Shaohang Xu, Lin Zhang, Jianbin Luo, Chi Zhang, Guoxin Xie
Article
Nanoscience & Nanotechnology
Jisen Tian, Xuan Yin, Jinjin Li, Wei Qi, Peng Huang, Xinchun Chen, Jianbin Luo
ACS APPLIED MATERIALS & INTERFACES
(2020)
Article
Chemistry, Multidisciplinary
Guangyan Chen, Jun Zhao, Kai Chen, Siyu Liu, Minyi Zhang, Yongyong He, Jianbin Luo
Article
Engineering, Mechanical
Yanfei Fang, Liran Ma, Jianbin Luo
TRIBOLOGY INTERNATIONAL
(2020)
Article
Engineering, Mechanical
Junyuan Mao, Guangyan Chen, Jun Zhao, Yongyong He, Jianbin Luo
Summary: The study found that graphene can effectively reduce the coefficient of friction and wear scar depth in the steel/copper friction pair, but it slightly increases under high loads; while in the steel/steel friction pair, graphene exhibits excellent tribological properties. Severe plastic deformation on the copper surface reduces the stability of the graphene tribofilm.
Review
Engineering, Mechanical
Feng He, Guoxin Xie, Jianbin Luo
Article
Chemistry, Physical
A. Temmler, D. Liu, J. Luo, R. Poprawe
APPLIED SURFACE SCIENCE
(2020)
Article
Engineering, Mechanical
Jianxun Xu, Ting Luo, Xinchun Chen, Chenhui Zhang, Jianbin Luo
TRIBOLOGY INTERNATIONAL
(2020)
Article
Materials Science, Multidisciplinary
Minyi Zhang, Jinhua Chen, Yang Li, Guangyan Chen, Yongyong He, Jianbin Luo
Article
Engineering, Mechanical
Busra Duran, Jerome Cavoret, David Philippon, Fabrice Ville, Arnaud Ruellan, Frank Berens
Summary: This study analyzes the changes in the physicochemical properties and tribological performances of gear transmission oils during field operation, finding differences from traditional engine oils.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Baocheng Liu, Hongsheng Chen, Jun Zhou, Jing Wang, Wenxian Wang, Xiaochun Chen, Sanxiao Xi
Summary: This study used fast hot pressing sintering to fabricate WC/AlCoCrFeNi2.1 metal matrix composites (MMCs). It was found that the addition of reinforced particles increased the microhardness, nanoindentation and wear resistance of the MMCs. During frictional processes, an oxide film formed, providing material protection, enhancing stability and reducing friction-induced losses.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Pradip Kumar Verma, Alok Singh
Summary: This study investigates the mechanical properties and wear resistance of CoMoMnNiV high entropy alloy reinforced aluminium matrix composite processed through stir-squeeze casting assisted with an ultrasonic transducer. The results show significant improvements in mechanical properties and wear resistance, with the composite containing 8 wt% HEA demonstrating the highest resistance to wear. Optical microscopy, SEM, and an optical profilometer were used for a thorough examination of the microstructure and worn surface.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Zhenghai Yang, Yingjian Song, Jinlong Jiao, Wenbo Li, Bao Shangguan, Yongzhen Zhang
Summary: This study investigated the friction, wear properties, and current-carrying properties of copper-graphite composites paired with brass C28000. The results showed that the current-carrying properties of the composite materials were excellent, but their wear rate was the main limiting factor. Furthermore, an increase in the thickness of the graphite layer led to an improvement in the uniformity of damage.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Moustafa Mahmoud Yousry Zaghloul, Karen Steel, Martin Veidt, Michael T. Heitzmann
Summary: This research evaluates and compares the impact of different material types on the tribological characteristics of Polyamide 6 composites, and finds that glass fiber-reinforced Polyamide 6 exhibits better friction and wear performance under high-pressure velocity factors.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Shaoqing Qin, Lida Zhu
Summary: In this paper, the surface and subsurface damage of laser assisted grinding CrCoNi medium entropy alloys were investigated using molecular dynamics simulations. The results showed that the application of laser energy can reduce cutting forces and minimize subsurface damage.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Kaikui Zheng, Youxi Lin, Tingzheng Lai, Chenghui Gao, Ming Liu, Zhiying Ren
Summary: The study investigated the use of waste foundry resin-bonded sand as a substitute for copper in resin-based brake material. It found that the waste sand was more favorable for improving the overall friction and wear properties of the material compared to copper. Waste sand benefited the material by forming a friction layer, leading to increased friction coefficient and stability. Brake material with 10-15% waste sand showed excellent heat-fade resistance.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Dayang Li, Fanhao Zhou, Yutong Gao, Kun Yang, Huimin Gao
Summary: This article introduces a continuous prediction model based on deep learning for predicting the power output of steam turbines. The model uses long short term memory (LSTM) method to develop a trend prediction model and optimizes the prediction model through feature selection method. Experimental results show that the model outperforms other models in terms of prediction performance.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Tomohiro Toyoda, Ryo Yasuike, Toshihiro Noda
Summary: In this study, a elasto-plastic constitutive model of friction incorporating the concept of superloading surface was developed based on the subloading friction model. The proposed model achieves a smooth transition of friction by describing the evolution rule of structure, treating the state with static friction coefficient larger than kinetic friction coefficient as the bulkiness of structure. The positive definiteness of the plastic multiplier, loading condition, and material parameters were derived, and the validity of the proposed model in accordance with the subloading-friction model was confirmed through a stick-slip simulation of a mass-spring system.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
P. Balaji, B. Surya Rajan, K. Sathickbasha, P. Baskara Sethupathi, Deviga Magadevan
Summary: This study emphasizes the importance of using a variety of solid lubricants with different oxidation temperature regimes to enhance the tribological performance of brake pads.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Jian Ma, Yancong Liu, Javad Mostaghimi, Na Zhang
Summary: This paper investigates the influence of preparation strategies on the lubrication properties of surface textures. Three laser scanning strategies are proposed to achieve a sinusoidal textured surface, and the evolution of surface structure and chemical composition is discussed. The findings show that ridge structures enhance anti-wear properties but also increase the friction coefficient. However, the oil cover preparation method prevents the formation of ridges and improves wettability.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Mohammad Roostaei, Arvin Taghizadeh Tabrizi, Hossein Aghajani
Summary: In this research, the Al2O3/MoS2 nanocomposite coating layer was successfully applied on the surface of Ti-6Al-4 V alloy. The relation between the surface characteristics and wear resistance of the coating was studied using atomic force microscopy analysis and pin-on-disk wear test method. The results showed that the nanocomposite coating significantly reduced the wear rate and provided an equation to calculate the Lancaster coefficient.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Musa Bilgin, Sener Karabulut, Halil Karakoc, Yunus Kayir, Murat Sarikaya
Summary: This study investigates various methods to improve the machinability efficiency of Inconel 718 alloy while considering their effect on microstructural properties. The results show that hot+PMQL, hot+SiCNMQL, and hot+Al2O3-NMQL contribute significantly to the improvement of machinability characteristics. The EBSD analysis also reveals that a limited area is affected by heat in the hot machining environment and that the removal of the heated layer during milling process helps preserve the microstructure.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Q. Gao, Y. Fan, Y. G. Wu, J. L. Liu, J. Wang, L. Li
Summary: Fretting wear significantly affects the hysteresis behavior of the contact surface and leads to joint degradation. This study investigates the influence of harmonic normal force on the evolution of interface morphology and contact parameters with fretting wear. The results show that the harmonic normal force can significantly influence the hysteresis loop and the energy dissipation distribution on the contact surface.
TRIBOLOGY INTERNATIONAL
(2024)
Article
Engineering, Mechanical
Benjamin Weiland, Floriane Leclinche, Anis Kaci, Brigitte Camillieri, Betty Lemaire-Semail, Marie -Ange Bueno
Summary: This study presents a systematic approach to generating control signals for a tactile simulator that simulate the touch of textile fabrics. By using a friction modulation tactile surface and acquiring forces from real surfaces with artificial finger mimicking fingerprints, control signals are generated and processed in the frequency domain before sending them to the tactile stimulator. The study focuses on the potential benefits of incorporating fingerprint information in fabric simulations to achieve a more realistic tactile perception. A sensory analysis with 36 participants using the generated control signals showed better discrimination without fingerprint information.
TRIBOLOGY INTERNATIONAL
(2024)