Article
Engineering, Mechanical
Nathan Fantecelle Strey, Cherlio Scandian
Summary: This study investigated the impact of different materials and polishing loads on the surface quality of ceramic tribological components. The results showed that silicon carbide had higher material removal rate and better surface finish, while alumina and zirconia-toughened alumina mainly relied on ductile mechanisms to improve surface quality.
Article
Engineering, Mechanical
Song Yuan, Xiaoguang Guo, Ming Li, Zhuji Jin, Dongming Guo
Summary: Oxidants play a crucial role in the final surface quality and removal rate during CMP. This study presents a new polishing slurry based on Fenton reaction, achieving high quality and efficiency removal of diamond.
TRIBOLOGY INTERNATIONAL
(2022)
Article
Engineering, Electrical & Electronic
Jaewon Lee, Eungchul Kim, Chulwoo Bae, Hyunho Seok, Jinil Cho, Kubra Aydin, Taesung Kim
Summary: In this study, the surface of ceria was reduced by contact with hydrogen gas in a high temperature isothermal environment, resulting in the formation of surface hydroxyls. These hydroxyls then desorbed to form H2O and oxygen vacancies. The reduction reaction caused a change in the crystal structure, leading to a color change in ceria from yellow to blue. The reducing ability of hydrogen gas increased by 12.7% under isothermal conditions at 1000 degrees C, and the material removal rate (MRR) of reduced ceria improved by up to 37.7% compared to the original ceria.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Engineering, Electrical & Electronic
Sanghuck Jeon, Jiah Hong, Seokjun Hong, Chaitanya Kanade, Kihong Park, Hyunho Seok, Hojoong Kim, Sunyoung Lee, Taesung Kim
Summary: The addition of poly(ethylene glycol) (PEG) to poly(diallyldimethylammonium chloride) (PDADMAC) solutions inhibits adsorption of PDADMAC on polysilicon films, suppressing polysilicon static etching and removal amounts while improving surface roughness. Adsorption mechanism of PEG on polysilicon films and its inhibitory effect on PDADMAC during CMP process were investigated.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2021)
Article
Engineering, Mechanical
Rongjuan Wang, Chengyong Wang
Summary: Due to the popularization of coating technology, physical Vapor Deposition (PVD) coated tools have become indispensable in the cutting process. The micro abrasive slurry jet (MASJ) polishing technology is first applied to the post-treatment of coated tools to improve their processing performance. The results show that MASJ machining can effectively improve the machining performance of coated tools.
CHINESE JOURNAL OF MECHANICAL ENGINEERING
(2023)
Article
Engineering, Manufacturing
Zhenyu Zhang, Jie Liu, Wei Hu, Lezhen Zhang, Wenxiang Xie, Longxing Liao
Summary: The novel green CMP technique effectively reduces the surface roughness of sapphire, achieving lower material removal rates and processing times, providing new perspectives for the semiconductor and microelectronic industries.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Chemistry, Physical
Wantang Wang, Baoguo Zhang, Yunhui Shi, Jiakai Zhou, Ru Wang, Nengyuan Zeng
Summary: The study combines mixed abrasive slurry (MAS) with photocatalytic effect in the SiC-CMP process to achieve efficient enhanced CMP technology. By using MAS consisting of Al2O3 and ZrO2 abrasives, a high material removal rate and surface roughness can be obtained under UV irradiation.
APPLIED SURFACE SCIENCE
(2022)
Article
Automation & Control Systems
Ziwei Wu, Jianyun Shen, Xian Wu, Yunfeng Peng, Shaolong Lin, Linbin Huang, Xuepeng Huang, Laifa Zhu
Summary: In this study, the bonnet polishing method was used to obtain a super-smooth surface for glass-ceramics. The removal mechanism of glass-ceramics was analyzed and the dispersion of abrasive particles in polishing slurry with different dispersants was investigated. The results from comparative experiments demonstrated the significant impact of the dispersion effect on the polishing quality. Finally, the optimal processing parameters were determined through orthogonal experiments and a super-smooth surface with a surface roughness Ra of 3.16 nm was achieved using alumina abrasive particles with an average size of 2.5 μm.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2023)
Article
Engineering, Mechanical
Gengzhuo Li, Chen Xiao, Shibo Zhang, Shengquan Luo, Yuhan Chen, Yongbo Wu
Summary: To address the low polishing efficiency in traditional loose-abrasive chemical mechanical polishing, a humidity-controlled fixed-abrasive chemical mechanical polishing method using CeO2 pellet is proposed. Both nano-scratch tests and fixed-abrasive polishing experiments confirm the irreplaceable role of water molecules in silicon material removal, with higher humidity resulting in better removal. Fixed-abrasive polishing experiments under saturated humidity achieved a surface roughness below Ra 2 nm at an efficiency of 0.9 μm/h, with minimal stress on the polished surface. The method is proven effective for stress relief after grinding.
TRIBOLOGY INTERNATIONAL
(2023)
Article
Engineering, Mechanical
Seungchul Hong, Deoksu Han, Keon-Soo Jang
Summary: The study focused on improving the planarization performance of dielectric layers by adjusting the zeta potential of particles and using surfactants, achieving a balance between performance and wafer defect density. High-quality wafer surfaces with rare defects, low roughness, and no contamination were achieved by tailoring the surface potential of colloidal silica nanoparticles and reducing defect concentration using fluorinated surfactant-induced intermolecular repulsion.
Article
Chemistry, Analytical
Hyunseop Lee
Summary: Efforts have been made to improve the efficiency of semiconductor manufacturing by reducing the environmental burden. Chemical mechanical polishing (CMP), used in semiconductor production, has been studied to increase material removal rate (MRR) while reducing environmental impact. This study analyzed the effect of voltage on the chemical solution and studied the tribological material removal characteristics in abrasive-free CMP. The results showed that electrolytic ionization increased the dissolved oxygen (DO) and MRR, while also increasing frictional force and temperature during CMP.
Article
Engineering, Chemical
Kuan-Yu Chen, Tse-Yi Tu, Yi-Hua Fan, A-Cheng Wang, Pei-Keng Fu
Summary: A rotating cylinder-based magnetic finishing setup was developed to allow gel abrasive and workpieces to tumble and rotate together during the polishing process, resulting in improved polishing effects. Experimental results showed that using bidirectional trapezoidal wave drive for the rotating cylinder achieved better average surface roughness and removed material weight results compared to the other two operating modes.
Article
Chemistry, Analytical
Pengfei Chen, Yuewu Gao, Yugang Zhao, Guoyong Zhao, Guixiang Zhang, Haiyun Zhang, Zhuang Song
Summary: This paper discusses the application of bonded magnetic abrasive powders (MAPs) in the magnetic abrasive finishing (MAF) process. By using a double-stage atomization technique, MAPs with CBN as the abrasive phase were successfully manufactured to improve the finishing performance of super-hard materials. Experimental results showed that the strong cutting ability of atomized CBN MAPs significantly improved the surface roughness of cemented carbide parts at the optimal parameters.
Article
Chemistry, Physical
Zifeng Zhao, Zhenyu Zhang, Chunjing Shi, Junyuan Feng, Xuye Zhuang, Li Li, Fanning Meng, Haodong Li, Zihang Xue, Dongdong Liu
Summary: Quartz glass has excellent physicochemical properties and is widely used in modern high technology. Traditional polishing slurry, which often contains strong acid, strong alkali, and corrosive additives, causes environmental pollution and damages the parts. To address these issues, a novel quartz glass polishing slurry was developed using cerium oxide, Lanthanum oxyfluoride, potassium pyrophosphate, sodium N-lauroyl sarcosinate, and sodium polyacrylate. The slurry showed improved suspension stability and resulted in a smoother sample surface with a lower surface roughness and higher material removal rate compared to the current industry standard.
Article
Chemistry, Physical
Yubiao Li, Zhenyu Zhang, Chunjing Shi, Dongdong Liu, Lu Liu
Summary: In this study, a novel green chemical mechanical polishing (CMP) method was developed to remove defects on the surface of KDP, achieving the lowest surface roughness and damaged layer thickness.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2023)
Article
Materials Science, Multidisciplinary
Filip Ilie, Tiberiu Laurian
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE
(2015)
Article
Thermodynamics
Filip Ilie
HEAT AND MASS TRANSFER
(2017)
Article
Thermodynamics
Filip Ilie
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER
(2018)
Article
Chemistry, Multidisciplinary
Filip Ilie
JOURNAL OF NANOPARTICLE RESEARCH
(2013)
Article
Materials Science, Multidisciplinary
Filip Ilie, George Ipate
Summary: The selective transfer phenomenon (STP) is a physico-chemical process that occurs in the contact area of a friction pair, involving the metallic transfer of micro/nanometric particles to form a thin tribologically performing layer. This layer, with its small thickness and porosity, can accommodate the movement of dislocations and provide low wear and friction coefficients. The study of the dislocations' influence on the tensions field during the STP reveals the importance and utility of dislocations in maintaining the equilibrium processes and protecting the layer from destruction.
Article
Chemistry, Physical
Filip Ilie, Ioan Alexandru Saracin, Gheorghe Voicu
Summary: This study investigates the wear phenomenon of a dental milling cutter based on experimental results and data, and validates it through statistical-mathematical modeling. The study presents the statistical-mathematical modeling results which interpolate the experimental data and approximate the wear process of the dental milling cutter. These results are crucial as they lead to polynomial functions that accurately describe the wear phenomenon. The study provides important insights and practical applications for extending the life of dental milling cutters and optimizing their operation.
Review
Chemistry, Physical
Filip Ilie, Andreea-Catalina Cristescu
Summary: This paper analyzes the tribological behavior of the braking disk-pad system, focusing on the impact of material structural changes on the stability of the braking system. Through various testing methods, the study obtains friction patterns and the influence of material structural changes on the braking system.
Article
Chemistry, Physical
Filip Ilie, George Ipate, Florentina Cristina Manaila
Summary: The study found that TiO2 particles demonstrate effective performance as a solid lubricant in experiments, with self-repairing and self-replenishing characteristics. Using the control volume fractional coverage (CVFC) model, the wear rate of the pellet and the friction coefficient of the slider pad can be estimated.
Article
Materials Science, Multidisciplinary
Filip Ilie, Andreea-Catalina Cristescu
Summary: This study investigates the tribological properties of a lubricating oil-MoS2 nanoparticles mixture under different friction conditions. The results show that the nanoparticles form a protective and lubricating layer, significantly improving the performance of the friction pair.
Article
Chemistry, Physical
Filip Ilie, Ileana-Liliana Minea, Constantin Daniel Cotici, Andrei-Florin Hristache
Summary: Chemical-mechanical planarization (CMP) is a technology that combines chemical and mechanical interactions to achieve global planarization of wafer surfaces. Friction force and heat generated by friction are important mechanical parameters, which have a significant impact on the material removal rate. Introducing colloidal silica as an abrasive into the CMP slurry can increase both friction force and material removal rate. The control of friction force and slurry stability is crucial for maintaining good planarization quality.
Article
Engineering, Mechanical
Filip Ilie
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY
(2019)
Article
Engineering, Mechanical
Filip Ilie, George Ipate
Proceedings Paper
Materials Science, Multidisciplinary
Filip Ilie, Georgiana Chisiu, George Ipate
13TH INTERNATIONAL CONFERENCE ON TRIBOLOGY (ROTRIB'16)
(2017)
Article
Engineering, Mechanical
Filip Ilie, Cristina Covaliu
Article
Materials Science, Coatings & Films
F. Ilie
TRIBOLOGY-MATERIALS SURFACES & INTERFACES
(2013)
Article
Engineering, Mechanical
Huiyi Yang, Yang Xu, Chao Xu
Summary: This study focuses on the impact of dry friction interfaces on the dynamics of jointed structures, particularly on the statistics of contact pressure distribution. Through experimental and simulation analysis, it is found that surface roughness and contact load have significant effects on contact area, contact stiffness, and mean contact pressure.
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY
(2024)
Article
Engineering, Mechanical
Guanglan Hu, Houfu Dai
Summary: The effect of metal coating on the machinability of cubic silicon carbide was investigated using molecular dynamics simulation. The results showed that the type of coating has a significant impact on cutting force, surface morphology, stress, and tool wear. Among the three metals studied, Cu coating had the greatest impact on improving cutting performance.
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY
(2024)
Article
Engineering, Mechanical
Yunfan Liu, Guozheng Ma, Lina Zhu, Cuihong Han, Zhen Li, Bin Zhang, Haichao Zhao, Haidou Wang, Shuying Chen
Summary: The service performance of coated self-lubricating spherical plain bearings can be improved by applying self-lubricating coatings, especially double-sided coatings. The presence of a large-area and complete mixed friction transfer film on the contact surfaces can cause a signal downstage before the signal mutation stage.
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY
(2024)
Article
Engineering, Mechanical
Yakup Artun, C. Oktay Azeloglu, Gokhan Taylan
Summary: This article investigates the tribological properties of polymer journal bearings, particularly focusing on radial journal bearings made from UHMWPE and POM materials with different surface qualities. The study examines the performance of these bearings under varying load and speed conditions, and analyzes the relationship between material and surface roughness in tribological performance.
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY
(2024)