Advanced microelectromechanical systems-based nanomechanical testing: Beyond stress and strain measurements

Title
Advanced microelectromechanical systems-based nanomechanical testing: Beyond stress and strain measurements
Authors
Keywords
-
Journal
MRS BULLETIN
Volume 44, Issue 06, Pages 487-493
Publisher
Cambridge University Press (CUP)
Online
2019-06-11
DOI
10.1557/mrs.2019.123

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