MEMS for In Situ Testing—Handling, Actuation, Loading, and Displacement Measurements
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Title
MEMS for In Situ Testing—Handling, Actuation, Loading, and Displacement Measurements
Authors
Keywords
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Journal
MRS BULLETIN
Volume 35, Issue 05, Pages 375-381
Publisher
Cambridge University Press (CUP)
Online
2011-02-02
DOI
10.1557/mrs2010.570
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