Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2in the Anodic Dissolution of Silicon in Acidic Electrolytes
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Title
Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2in the Anodic Dissolution of Silicon in Acidic Electrolytes
Authors
Keywords
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Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 27, Issue 6, Pages 1604310
Publisher
Wiley
Online
2016-12-12
DOI
10.1002/adfm.201604310
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