Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2in the Anodic Dissolution of Silicon in Acidic Electrolytes
出版年份 2016 全文链接
标题
Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2O2in the Anodic Dissolution of Silicon in Acidic Electrolytes
作者
关键词
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出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 27, Issue 6, Pages 1604310
出版商
Wiley
发表日期
2016-12-12
DOI
10.1002/adfm.201604310
参考文献
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