Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate

Title
Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
Authors
Keywords
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Journal
Nanomaterials
Volume 8, Issue 11, Pages 896
Publisher
MDPI AG
Online
2018-11-01
DOI
10.3390/nano8110896

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