Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
Published 2018 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
Authors
Keywords
-
Journal
Nanomaterials
Volume 8, Issue 11, Pages 896
Publisher
MDPI AG
Online
2018-11-01
DOI
10.3390/nano8110896
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
- (2018) Grégory Abadias et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives
- (2018) E.P. Koumoulos et al. MATERIALS & DESIGN
- Nanoscale residual stress depth profiling by Focused Ion Beam milling and eigenstrain analysis
- (2018) A.M. Korsunsky et al. MATERIALS & DESIGN
- Cavitation in strained polyethylene/aluminium oxide nanocomposites
- (2017) D. Liu et al. EUROPEAN POLYMER JOURNAL
- New Insights into Nanoindentation-Based Adhesion Testing
- (2017) A. Kleinbichler et al. JOM
- Effects of indenter angle on micro-scale fracture toughness measurement by pillar splitting
- (2017) Matteo Ghidelli et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Design, fabrication and characterization of multilayer Cr-CrN thin coatings with tailored residual stress profiles
- (2016) Marco Renzelli et al. MATERIALS & DESIGN
- Influence of Ti–TiN multilayer PVD-coatings design on residual stresses and adhesion
- (2015) R. Ali et al. MATERIALS & DESIGN
- Aluminum nitride thin film growth and applications for heat dissipation
- (2015) Yingbin Bian et al. SURFACE & COATINGS TECHNOLOGY
- A critical comparison between XRD and FIB residual stress measurement techniques in thin films
- (2014) E. Bemporad et al. THIN SOLID FILMS
- The origin of stresses in magnetron-sputtered thin films with zone T structures
- (2010) R. Daniel et al. ACTA MATERIALIA
- Adhesion–delamination phenomena at the surfaces and interfaces in microelectronics and MEMS structures and packaged devices
- (2010) V K Khanna JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Focused ion beam ring drilling for residual stress evaluation
- (2009) Alexander M. Korsunsky et al. MATERIALS LETTERS
- Indentation fracture of low-dielectric constant films: Part I. Experiments and observations
- (2008) Dylan J. Morris et al. JOURNAL OF MATERIALS RESEARCH
- Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
- (2008) G.C.A.M. Janssen et al. THIN SOLID FILMS
- The influence of metallic interlayers on the adhesion of PVD TiN coatings on high-speed steel
- (2007) J. Gerth et al. WEAR
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started