Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate

标题
Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
作者
关键词
-
出版物
Nanomaterials
Volume 8, Issue 11, Pages 896
出版商
MDPI AG
发表日期
2018-11-01
DOI
10.3390/nano8110896

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