Aluminum nitride thin film growth and applications for heat dissipation

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Title
Aluminum nitride thin film growth and applications for heat dissipation
Authors
Keywords
Aluminum nitride, Thermal conductivity, Thin films, Thermal interface materials, LED
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 267, Issue -, Pages 65-69
Publisher
Elsevier BV
Online
2014-12-01
DOI
10.1016/j.surfcoat.2014.11.060

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