Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
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Title
Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
Authors
Keywords
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Journal
Nature Communications
Volume 9, Issue 1, Pages -
Publisher
Springer Nature America, Inc
Online
2018-09-24
DOI
10.1038/s41467-018-06524-3
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