An innovative way of etching MoS2: Characterization and mechanistic investigation
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Title
An innovative way of etching MoS2: Characterization and mechanistic investigation
Authors
Keywords
MoS<sub>2</sub>, etching, XeF<sub>2</sub>, graphene, photoluminescence, hexagonal
Journal
Nano Research
Volume 6, Issue 3, Pages 200-207
Publisher
Springer Nature
Online
2013-02-21
DOI
10.1007/s12274-013-0296-8
References
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