Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
出版年份 2018 全文链接
标题
Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures
作者
关键词
-
出版物
Nature Communications
Volume 9, Issue 1, Pages -
出版商
Springer Nature America, Inc
发表日期
2018-09-24
DOI
10.1038/s41467-018-06524-3
参考文献
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