Non-laminated growth of chlorine-doped zinc oxide films by atomic layer deposition at low temperatures

Title
Non-laminated growth of chlorine-doped zinc oxide films by atomic layer deposition at low temperatures
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 3, Issue 32, Pages 8336-8343
Publisher
Royal Society of Chemistry (RSC)
Online
2015-07-08
DOI
10.1039/c5tc01763g

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