Insights into the Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition of Thin Films from Methyldisiloxane Precursors

GC-MS Investigation of Organosilicon and Fluorocarbon Fed Plasmas

(2011) F. Fanelli et al.   CONTRIBUTIONS TO PLASMA PHYSICS

Ar/HMDSO/O2 Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products

(2010) Fiorenza Fanelli et al.   Plasma Processes and Polymers

Smooth and Self-Similar SiO2-like Films on Polymers Synthesized in Roll-to-Roll Atmospheric Pressure-PECVD for Gas Diffusion Barrier Applications

(2010) Peter Antony Premkumar et al.   Plasma Processes and Polymers

Thin film deposition and surface modification with atmospheric pressure dielectric barrier discharges

(2010) Fiorenza Fanelli   SURFACE & COATINGS TECHNOLOGY

Influence of gas flow dynamics on discharge stability and on the uniformity of atmospheric pressure PECVD thin film

(2009) H Caquineau et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

High Quality SiO2-like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

(2009) Peter Antony Premkumar et al.   Plasma Processes and Polymers

Film Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure in He/O2/HMDSO and He/N2O/HMDSO mixtures

(2009) Igor Vinogradov et al.   Plasma Processes and Polymers

On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

(2009) S A Starostin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Characteristics of SiO[sub 2]-Like Thin Film Deposited by Atmospheric-Pressure PECVD Using HMDS∕O[sub 2]∕Ar

(2008) J. H. Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Effect of Plasma Exposure on the Chemistry and Morphology of Aerosol-Assisted, Plasma-Deposited Coatings

(2008) Barry Twomey et al.   Plasma Processes and Polymers

Organic–inorganic behaviour of HMDSO films plasma-polymerized at atmospheric pressure

(2008) Rino Morent et al.   SURFACE & COATINGS TECHNOLOGY