Ar/HMDSO/O2 Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products

Published 2010 View Full Article

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Title
Ar/HMDSO/O2 Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 7, Issue 7, Pages 535-543
Publisher
Wiley
Online
2010-03-04
DOI
10.1002/ppap.200900159
References
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