GC-MS Investigation of Organosilicon and Fluorocarbon Fed Plasmas

Title
GC-MS Investigation of Organosilicon and Fluorocarbon Fed Plasmas
Authors
Keywords
-
Journal
CONTRIBUTIONS TO PLASMA PHYSICS
Volume 51, Issue 2-3, Pages 137-142
Publisher
Wiley
Online
2011-03-16
DOI
10.1002/ctpp.201000051

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