Film Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure in He/O2/HMDSO and He/N2O/HMDSO mixtures

Title
Film Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure in He/O2/HMDSO and He/N2O/HMDSO mixtures
Authors
Keywords
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Journal
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S514-S518
Publisher
Wiley
Online
2009-04-21
DOI
10.1002/ppap.200931102

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