On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

Published 2009 View Full Article

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Title
On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 18, Issue 4, Pages 045021
Publisher
IOP Publishing
Online
2009-09-12
DOI
10.1088/0963-0252/18/4/045021
References
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