The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure

Surface reactions as carbon removal mechanism in deposition of silicon dioxide films at atmospheric pressure

(2011) R. Reuter et al.   APPLIED PHYSICS LETTERS

Separation of VUV/UV photons and reactive particles in the effluent of a He/O2atmospheric pressure plasma jet

(2011) S Schneider et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma Process. Polym. 2/2011

(2011) Marina Ricci et al.   Plasma Processes and Polymers

Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge

(2010) D Trunec et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma-chemical reactions: low pressure acetylene plasmas

(2010) J Benedikt   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Characterization of the effluent of a He/O2microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry

(2010) D Ellerweg et al.   NEW JOURNAL OF PHYSICS

Ar/HMDSO/O2 Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products

(2010) Fiorenza Fanelli et al.   Plasma Processes and Polymers

Deposition of silicon dioxide films using an atmospheric pressure microplasma jet

(2009) V. Raballand et al.   JOURNAL OF APPLIED PHYSICS

High Quality SiO2-like Layers by Large Area Atmospheric Pressure Plasma Enhanced CVD: Deposition Process Studies by Surface Analysis

(2009) Peter Antony Premkumar et al.   Plasma Processes and Polymers

Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low-Adhesion Surfaces

(2009) Uwe Lommatzsch et al.   Plasma Processes and Polymers

Molecular beam sampling system with very high beam-to-background ratio: The rotating skimmer concept

(2009) J. Benedikt et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet

(2008) V. Raballand et al.   APPLIED PHYSICS LETTERS

Absolute atomic oxygen density profiles in the discharge core of a microscale atmospheric pressure plasma jet

(2008) Nikolas Knake et al.   APPLIED PHYSICS LETTERS

Local deposition of SiOxplasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)

(2008) J Schäfer et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS