Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge

Published 2010 View Full Article

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Title
Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 22, Pages 225403
Publisher
IOP Publishing
Online
2010-05-20
DOI
10.1088/0022-3727/43/22/225403

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