Deposition of silicon dioxide films using an atmospheric pressure microplasma jet

Published 2009 View Full Article

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Title
Deposition of silicon dioxide films using an atmospheric pressure microplasma jet
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 8, Pages 083304
Publisher
AIP Publishing
Online
2009-04-23
DOI
10.1063/1.3108541
References
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