Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet

Published 2008 View Full Article

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Title
Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 9, Pages 091502
Publisher
AIP Publishing
Online
2008-03-06
DOI
10.1063/1.2844880

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