Local deposition of SiOxplasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)

Published 2008 View Full Article

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Title
Local deposition of SiOxplasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 19, Pages 194010
Publisher
IOP Publishing
Online
2008-09-16
DOI
10.1088/0022-3727/41/19/194010

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