Silicon Oxide Coatings with Very High Rates (>10 nm/s) by Hexamethyldisiloxane-Oxygen Fed Atmospheric-Pressure VHF Plasma: Film-Forming Behavior Using Cylindrical Rotary Electrode

Plasma Process. Polym. 2/2011

(2011) Marina Ricci et al.   Plasma Processes and Polymers

Room-Temperature Silicon Nitrides Prepared with Very High Rates (>50 nm/s) in Atmospheric-Pressure Very High-Frequency Plasma

(2010) Hiroaki Kakiuchi et al.   PLASMA CHEMISTRY AND PLASMA PROCESSING

Ar/HMDSO/O2 Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products

(2010) Fiorenza Fanelli et al.   Plasma Processes and Polymers

Low refractive index silicon oxide coatings at room temperature using atmospheric-pressure very high-frequency plasma

(2010) H. Kakiuchi et al.   THIN SOLID FILMS

Silicon oxide diffusion barrier coatings on polypropylene

(2010) L. Körner et al.   THIN SOLID FILMS

Deposition of silicon dioxide films using an atmospheric pressure microplasma jet

(2009) V. Raballand et al.   JOURNAL OF APPLIED PHYSICS

Microcrystalline Si films grown at low temperatures (90–220 °C) with high rates in atmospheric-pressure VHF plasma

(2009) Hiroaki Kakiuchi et al.   JOURNAL OF APPLIED PHYSICS

Scratch resistance and adherence of novel organic–inorganic hybrid coatings on metallic and non-metallic substrates

(2009) Yung-Hoe Han et al.   SURFACE & COATINGS TECHNOLOGY

Enhanced scratch resistance of polycarbonate by low temperature plasma-polymerized organosilica

(2009) Yung-Sen Lin et al.   THIN SOLID FILMS

Effects of N2 addition on enhanced scratch resistance of flexible polycarbonate substrates by low temperature plasma-polymerized organo-silicon oxynitride

(2008) Y.-S. Lin et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Permeation mechanisms of pulsed microwave plasma deposited silicon oxide films for food packaging applications

(2008) Michael Deilmann et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Different Ways to Plasma-Polymerize HMDSO in DBD Configuration at Atmospheric Pressure for Corrosion Protection

(2008) Jérôme Bour et al.   Plasma Processes and Polymers

High-Rate SiO2Deposition by Oxygen Cold Arc Plasma Jet at Atmospheric Pressure

(2008) Man H. Han et al.   Plasma Processes and Polymers

Organic–inorganic behaviour of HMDSO films plasma-polymerized at atmospheric pressure

(2008) Rino Morent et al.   SURFACE & COATINGS TECHNOLOGY

High-quality epitaxial Si growth at low temperatures by atmospheric pressure plasma CVD

(2008) K. Yasutake et al.   THIN SOLID FILMS

Scratch resistance analysis of coatings on glass and polycarbonate

(2008) W. Boentoro et al.   THIN SOLID FILMS

High quality plasma enhanced chemical vapour deposited silicon oxide gas barrier coatings on polyester films

(2007) D.G. Howells et al.   THIN SOLID FILMS