High-Rate SiO2Deposition by Oxygen Cold Arc Plasma Jet at Atmospheric Pressure

Published 2008 View Full Article

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Title
High-Rate SiO2Deposition by Oxygen Cold Arc Plasma Jet at Atmospheric Pressure
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 5, Issue 9, Pages 861-866
Publisher
Wiley
Online
2008-09-30
DOI
10.1002/ppap.200800061

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