Thin-film lithium niobate-on-insulator waveguides fabricated on silicon wafer by room-temperature bonding method with silicon nanoadhesive layer

Room-temperature wafer bonding of LiNbO3 and SiO2 using a modified surface activated bonding method

(2018) Ryo Takigawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

(2018) Andreas Boes et al.   Laser & Photonics Reviews

Investigation of the interface between LiNbO3 and Si wafers bonded by laser irradiation

(2017) Ryo Takigawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Room-temperature transfer bonding of lithium niobate thin film on micromachined silicon substrate with Au microbumps

(2017) Ryo Takigawa et al.   SENSORS AND ACTUATORS A-PHYSICAL

Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides

(2016) Ryo Takigawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Room temperature bonding of SiO2and SiO2by surface activated bonding method using Si ultrathin films

(2016) Jun Utsumi et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

110 GHz CMOS compatible thin film LiNbO3 modulator on silicon

(2016) Andrew J. Mercante et al.   OPTICS EXPRESS

Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing

(2016) Martin F. Volk et al.   OPTICS EXPRESS

Patterned ion-sliced lithium niobate for hybrid photonic integration on silicon

(2016) Li Chen et al.   Optical Materials Express

Silicon carbide wafer bonding by modified surface activated bonding method

(2015) Tadatomo Suga et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

(2015) Jintian Lin et al.   Scientific Reports

Lithium niobate ridged waveguides with smooth vertical sidewalls fabricated by an ultra-precision cutting method

(2014) Ryo Takigawa et al.   OPTICS EXPRESS

Lithium niobate on insulator (LNOI) for micro-photonic devices

(2012) G. Poberaj et al.   Laser & Photonics Reviews

Compact electric field sensors based on indirect bonding of lithium niobate to silicon microrings

(2012) Li Chen et al.   OPTICS EXPRESS

Passive Alignment and Mounting of LiNbO$_3$ Waveguide Chips on Si Substrates by Low-Temperature Solid-State Bonding of Au

(2011) Ryo Takigawa et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing

(2011) Nadège Courjal et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Nanoadhesion layer for enhanced Si–Si and Si–SiN wafer bonding

(2011) Ryuichi Kondou et al.   MICROELECTRONICS RELIABILITY

Air-gap structure between integrated LiNbO_3 optical modulators and micromachined Si substrates

(2011) Ryo Takigawa et al.   OPTICS EXPRESS

Photonic crystal structures in ion-sliced lithium niobate thin films

(2009) Frederik Sulser et al.   OPTICS EXPRESS

Room-Temperature Bonding of Vertical-Cavity Surface-Emitting Laser Chips on Si Substrates Using Au Microbumps in Ambient Air

(2008) Ryo Takigawa et al.   Applied Physics Express