Room-temperature transfer bonding of lithium niobate thin film on micromachined silicon substrate with Au microbumps

Published 2017 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Room-temperature transfer bonding of lithium niobate thin film on micromachined silicon substrate with Au microbumps
Authors
Keywords
Hetero-integration, Room-temperature transfer bonding, LiNbO, 3, thin film, LiNbO, 3, /Si structure, Optical microsystem
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 264, Issue -, Pages 274-281
Publisher
Elsevier BV
Online
2017-08-08
DOI
10.1016/j.sna.2017.08.015

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.