Investigation of the interface between LiNbO3 and Si wafers bonded by laser irradiation

Published 2017 View Full Article

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Title
Investigation of the interface between LiNbO3 and Si wafers bonded by laser irradiation
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 56, Issue 8, Pages 088002
Publisher
Japan Society of Applied Physics
Online
2017-07-03
DOI
10.7567/jjap.56.088002

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