Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation

Published 2008 View Full Article

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Title
Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 41, Pages 415704
Publisher
IOP Publishing
Online
2008-09-05
DOI
10.1088/0957-4484/19/41/415704

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