Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage
出版年份 2014 全文链接
标题
Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 25, Issue 48, Pages 485704
出版商
IOP Publishing
发表日期
2014-11-12
DOI
10.1088/0957-4484/25/48/485704
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Characterisation of Ion Implantation-induced Defects in Certain Technologically Important Materials by Positron Annihilation
- (2014) P. Nambissan DEFENCE SCIENCE JOURNAL
- Novel nanosample preparation with a helium ion microscope
- (2013) Maria Rudneva et al. JOURNAL OF MATERIALS RESEARCH
- Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing
- (2013) H. Wu et al. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
- The Effect of He Implantation on the Tensile Properties and Microstructure of Cu/Fe Nano-Bicrystals
- (2012) Peri Landau et al. ADVANCED FUNCTIONAL MATERIALS
- Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft
- (2012) Paul F. A. Alkemade et al. SCANNING
- Helium Implantation Effects on the Compressive Response of Cu Nanopillars
- (2012) Qiang Guo et al. Small
- Observation of synchronized atomic motions in the field ion microscope
- (2012) FHM F. Rahman et al. ULTRAMICROSCOPY
- The neon gas field ion source—a first characterization of neon nanomachining properties
- (2011) Richard H. Livengood et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
- Modeling the Point-Spread Function in Helium-Ion Lithography
- (2011) Donald Winston et al. SCANNING
- The Prospects of a Subnanometer Focused Neon Ion Beam
- (2011) F. H. M. Rahman et al. SCANNING
- Etching of Graphene Devices with a Helium Ion Beam
- (2009) Max C. Lemme et al. ACS Nano
- Beam induced deposition of platinum using a helium ion microscope
- (2009) Colin A. Sanford et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Proximity effect in ion-beam-induced deposition of nanopillars
- (2009) Ping Chen et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Understanding imaging modes in the helium ion microscope
- (2009) Larry Scipioni et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Sub-10-nm nanolithography with a scanning helium beam
- (2009) Vadim Sidorkin et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
- (2009) Richard Livengood et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Simulation of focused ion beam etching by coupling a topography simulator and a Monte-Carlo sputtering yield simulator
- (2009) D. Kunder et al. MICROELECTRONIC ENGINEERING
- Contrast Mechanisms and Image Formation in Helium Ion Microscopy
- (2009) David C. Bell MICROSCOPY AND MICROANALYSIS
- Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation
- (2008) Daryl A Smith et al. NANOTECHNOLOGY
- Helium ion microscopy and its application to nanotechnology and nanometrology
- (2008) Michael T. Postek et al. SCANNING
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started