Helium ion microscopy and its application to nanotechnology and nanometrology

Published 2008 View Full Article

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Title
Helium ion microscopy and its application to nanotechnology and nanometrology
Authors
Keywords
-
Journal
SCANNING
Volume 30, Issue 6, Pages 457-462
Publisher
Wiley
Online
2008-11-04
DOI
10.1002/sca.20129

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