The neon gas field ion source—a first characterization of neon nanomachining properties

Published 2011 View Full Article

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Title
The neon gas field ion source—a first characterization of neon nanomachining properties
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
Volume 645, Issue 1, Pages 136-140
Publisher
Elsevier BV
Online
2011-01-05
DOI
10.1016/j.nima.2010.12.220

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