A DLVO model for catalyst motion in metal-assisted chemical etching based upon controlled out-of-plane rotational etching and force-displacement measurements

3D Spirals with Controlled Chirality Fabricated Using Metal-Assisted Chemical Etching of Silicon

(2012) Owen J. Hildreth et al.   ACS Nano

3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon

(2011) Owen J. Hildreth et al.   ADVANCED FUNCTIONAL MATERIALS

Modeling Surface Tension of Concentrated and Mixed-Solvent Electrolyte Systems

(2011) Peiming Wang et al.   INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH

Guided Three-Dimensional Catalyst Folding during Metal-Assisted Chemical Etching of Silicon

(2011) Konrad Rykaczewski et al.   NANO LETTERS

Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon

(2010) Konrad Rykaczewski et al.   ADVANCED MATERIALS

Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nanowire Arrays with Controlled Turning Angles

(2010) Huan Chen et al.   NANO LETTERS

Three-Dimensional Fabrication at Small Size Scales

(2010) Timothy G. Leong et al.   Small

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

(2008) Kuiqing Peng et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA

Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching

(2008) Zhipeng Huang et al.   NANO LETTERS

Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching

(2008) Keith J Morton et al.   NANOTECHNOLOGY