Investigation of temperature dependent dielectric constant of a sputtered TiN thin film by spectroscopic ellipsometry

Title
Investigation of temperature dependent dielectric constant of a sputtered TiN thin film by spectroscopic ellipsometry
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 3, Pages 033516
Publisher
AIP Publishing
Online
2014-02-15
DOI
10.1063/1.4862485

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