Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge

Title
Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
Authors
Keywords
-
Journal
Physica Status Solidi-Rapid Research Letters
Volume 9, Issue 4, Pages 220-224
Publisher
Wiley
Online
2015-03-28
DOI
10.1002/pssr.201510056

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