Surface Passivation of Boron-Diffused p-Type Silicon Surfaces With (1 0 0) and (1 1 1) Orientations by ALD Al$_{2}$O$_{3}$ Layers

Authors

Keywords

Journal

Volume 3, Issue 2, Pages 678-683

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2013-01-10

DOI

10.1109/jphotov.2012.2235525

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