Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma

Published 2012 View Full Article

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Title
Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 01A110
Publisher
American Vacuum Society
Online
2012-10-13
DOI
10.1116/1.4758782
References
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