Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

Published 2010 View Full Article

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Title
Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist
Authors
Keywords
-
Journal
ACS Nano
Volume 4, Issue 8, Pages 4815-4823
Publisher
American Chemical Society (ACS)
Online
2010-07-22
DOI
10.1021/nn100686v

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