Atomic layer deposition of epitaxial HfO2 thin films on r-cut sapphire

Femtosecond laser-induced damage of HfO2/SiO2 mirror with different stack structure

(2012) Shunli Chen et al.   APPLIED OPTICS

Application of deposited by ALD HfO2 and Al2O3 layers in double-gate dielectric stacks for non-volatile semiconductor memory (NVSM) devices

(2012) Robert Mroczyński et al.   APPLIED SURFACE SCIENCE

$\hbox{HfO}_{2}$-Based RRAM Devices With Varying Contact Sizes and Their Electrical Behavior

(2012) Venkatakrishnan Sriraman et al.   IEEE ELECTRON DEVICE LETTERS

Enhanced Operation in Charge-Trapping Nonvolatile Memory Device With $\hbox{Si}_{3}\hbox{N}_{4}/\hbox{Al}_{2}\hbox{O}_{3}/\hbox{HfO}_{2}$ Charge-Trapping Layer

(2012) Zong-Hao Ye et al.   IEEE ELECTRON DEVICE LETTERS

Phase transformations in films deposited by laser ablation of Hf in an oxygen Atmosphere

(2012) A. G. Bagmut et al.   TECHNICAL PHYSICS

Development of hafnium based high-k materials—A review

(2011) J.H. Choi et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Atomic layer deposition of HfO2: Effect of structure development on growth rate, morphology and optical properties of thin films

(2010) Raul Rammula et al.   APPLIED SURFACE SCIENCE

Hetero-epitaxial growth of the cubic single crystalline HfO2 film as high k materials by pulsed laser ablation

(2010) Xinqiang Zhang et al.   JOURNAL OF CRYSTAL GROWTH

Low-loss optical waveguides for the near ultra-violet and visible spectral regions with Al2O3 thin films from atomic layer deposition

(2010) Mustafa M. Aslan et al.   THIN SOLID FILMS

AlN/GaN insulated gate HEMTs with HfO2 gate dielectric

(2009) D.A. Deen et al.   ELECTRONICS LETTERS

Cube-on-cube epitaxy of Gd2O3-doped HfO2 films on Si(100) substrates by pulse laser deposition

(2009) Xinqiang Zhang et al.   JOURNAL OF CRYSTAL GROWTH

Epitaxial growth of high-κ TiO[sub 2] rutile films on RuO[sub 2] electrodes

(2009) K. Fröhlich et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Transmission electron microscopy characterization of HfO2/GaAs(001) heterostructures grown by molecular beam epitaxy

(2008) S.C. Liou et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Mercury CSD 2.0– new features for the visualization and investigation of crystal structures

(2008) Clare F. Macrae et al.   JOURNAL OF APPLIED CRYSTALLOGRAPHY

Molecular beam epitaxy-grown Al2O3/HfO2 high-κ dielectrics for germanium

(2008) W.C. Lee et al.   JOURNAL OF CRYSTAL GROWTH