Molecular beam epitaxy-grown Al2O3/HfO2 high-κ dielectrics for germanium

Published 2008 View Full Article

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Title
Molecular beam epitaxy-grown Al2O3/HfO2 high-κ dielectrics for germanium
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 7, Pages 2187-2190
Publisher
Elsevier BV
Online
2008-11-21
DOI
10.1016/j.jcrysgro.2008.11.045

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