Fabrication of highly ordered silicon pin-in-a-hole nanostructures via chemical etching of nanopatterned polymer masks
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Title
Fabrication of highly ordered silicon pin-in-a-hole nanostructures via chemical etching of nanopatterned polymer masks
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 21, Issue 32, Pages 11996
Publisher
Royal Society of Chemistry (RSC)
Online
2011-07-01
DOI
10.1039/c1jm10812c
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