Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching

Title
Wafer-scale silicon nanopillars and nanocones by Langmuir–Blodgett assembly and etching
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 13, Pages 133109
Publisher
AIP Publishing
Online
2008-10-07
DOI
10.1063/1.2988893

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