Fabrication of highly ordered silicon pin-in-a-hole nanostructures via chemical etching of nanopatterned polymer masks

标题
Fabrication of highly ordered silicon pin-in-a-hole nanostructures via chemical etching of nanopatterned polymer masks
作者
关键词
-
出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 21, Issue 32, Pages 11996
出版商
Royal Society of Chemistry (RSC)
发表日期
2011-07-01
DOI
10.1039/c1jm10812c

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