Study of a Negative Threshold Voltage Shift in Positive Bias Temperature Instability and a Positive Threshold Voltage Shift the Negative Bias Temperature Instability of Yttrium-Doped HfO2Gate Dielectrics

Published 2010 View Full Article

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Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

Volume 49, Issue 4, Pages 04DC24

Publisher

Japan Society of Applied Physics

Online

2010-04-20

DOI

10.1143/jjap.49.04dc24

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