Electrical characterisation of HfYO MIM-structures deposited by ALD

Published 2009 View Full Article

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Title
Electrical characterisation of HfYO MIM-structures deposited by ALD
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 16, Pages 4680-4683
Publisher
Elsevier BV
Online
2009-12-23
DOI
10.1016/j.tsf.2009.12.058

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