Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 36, Issue 4, Pages 1400-1401Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2008.924404
Keywords
capacitively coupled RF discharges; electron beams; phase resolved optical emission spectroscopy; plasma series resonance; stochastic heating
Categories
Funding
- DFG [SFB 591, GK 1051]
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The generation of electron beams by the expanding sheath is observed experimentally in asymmetric single-frequency capacitively coupled radio-frequency discharges using phase-resolved optical-emission spectroscopy. Depending on the discharge geometry and conditions, such beams can propagate through the entire discharge and are reflected at the opposing plasma boundary. They are closely related to stochastic heating, and their generation is enhanced by the plasma-series-resonance effect. Confinement of these energetic electrons can lead to an effective heating of the plasma.
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