Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon

Nanomanufacturing: Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates (Adv. Mater. 33/2011)

(2012) Suenne Kim et al.   ADVANCED MATERIALS

Reliability of Au-Ge and Au-Si Eutectic Solder Alloys for High-Temperature Electronics

(2012) Vivek Chidambaram et al.   JOURNAL OF ELECTRONIC MATERIALS

Transverse Interdigitated Electrode Actuation of Homogeneous Bulk PZT

(2012) Prakruthi Hareesh et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Fabrication and Characterization of Micromachined Piezoelectric T-Beam Actuators

(2012) Kiron Mateti et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Microfabrication of bulk PZT transducers by dry film photolithography and micro powder blasting

(2012) I Misri et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

PZT-Based Piezoelectric MEMS Technology

(2012) Gabriel L. Smith et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

Application of Micromachined $Y$ -Cut-Quartz Bulk Acoustic Wave Resonator for Infrared Sensing

(2011) Marcelo B. Pisani et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Giant Piezoelectricity on Si for Hyperactive MEMS

(2011) S. H. Baek et al.   SCIENCE

Epitaxial piezoelectric MEMS on silicon

(2010) D Isarakorn et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

(2010) A. Ababneh et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications

(2010) Takamichi Fujii et al.   SENSORS AND ACTUATORS A-PHYSICAL

High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers

(2010) Keiji Morimoto et al.   SENSORS AND ACTUATORS A-PHYSICAL

Advantages of PZT thick film for MEMS sensors

(2010) C.G. Hindrichsen et al.   SENSORS AND ACTUATORS A-PHYSICAL

Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS

(2010) S A Wilson et al.   Smart Materials and Structures

Impedance measurements for determination of elastic and piezoelectric coefficients of films

(2009) L Pardo et al.   Advances in Applied Ceramics

Ultra-precision grinding of PZT ceramics—Surface integrity control and tooling design

(2009) S. Arai et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Preparation of Pb(Mg1/3Nb2/3)O3–Pb(Zr,Ti)O3Thin Films by RF-Magnetron Sputtering and Their Electrical and Piezoelectric Properties

(2009) Satoru Fujii et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Piezoelectric MEMS sensors: state-of-the-art and perspectives

(2009) S Tadigadapa et al.   MEASUREMENT SCIENCE and TECHNOLOGY

Fabrication of piezoelectric MEMS devices-from thin film to bulk PZT wafer

(2008) Zhihong Wang et al.   JOURNAL OF ELECTROCERAMICS

Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS

(2008) Xiao-Hui Xu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Fabrication of piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O3 thin film

(2008) T Kobayashi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

The effect of the built-in stress level of AlN layers on the properties of piezoelectric vibration energy harvesters

(2008) K Karakaya et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING