Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS

Published 2008 View Full Article

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Title
Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 065001
Publisher
IOP Publishing
Online
2008-04-26
DOI
10.1088/0960-1317/18/6/065001

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